The SP3-61 is an indium/tin di-oxide semiconductor gas sensor which has a high sensitivity and selectivity to ozone. Using this model, detection of ozone is possible from low concentration ranges.
Structure
Ozone sensitive semiconductor material is thinly formed on the alumina substrate on which the gold electrodes are printed. A thick film heater of ruthenium oxide is printed on the reverse of the substrate and placed in the mesh ceramic housing.
