MEMS silicon DIE low pressure (5-300 psi) sensing element with high accuracy
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Description
Sensitivity. Stability. Accuracy. These are features you can rely on with the S Series, the newest MEMS silicon pressure sensor die from Merit Sensor.
It is produced in our own wafer fab in South Jordan, Utah, USA, along with all of Merit Sensor’s other products, where we can ensure the highest quality. To learn more about its features, read this short article.
SENTIUM: Merit Sensor products incorporate a proprietary Sentium® technology, developed to provide a best-in-class operating temperature range (-40°C to 150°C) and superior stability.
TECHNOLOGY: Merit Sensor utilizes a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. All products are RoHS compliant.
CAPABILITIES: Merit Sensor designs, engineers, fabricates, dices, assembles, and tests products from a state-of-the-art facility near Salt Lake City, Utah.
FEATURES
- Pressure Range: 5 to 300psi / 0.34 to 21 bar / 34 to 2,068 kPa
- Type: Absolute or gauge/gage
- Size: 1.5 mm x 1.5 mm x 0.9 mm
- Bridge: Closed and half closed
- Media: Clean, dry air and non-corrosive gases
- Shipping: Wafers on tape
- Applications
- BrandsMerit Sensors®
- TypeSensing element
- TechnologyMEMS
- Pressure Range<80 bar
- Pressure + TemperatureNo
- Differential PressureNo